Skip to content

titanium nitride · film

TiN

A hard, chemically stable nitride whose transition temperature can be tuned during deposition, used where a resonator has to be small and quiet.

TiN in numbers

Transition temperature
4.5 K
Made as
film
Nitrogen line
Below 77 K

What TiN runs in today

High-quality-factor superconducting resonators; kinetic-inductance detectors.

Source: Vissers et al., Applied Physics Letters 97, 232509 (2010)

Why engineers choose TiN

TiN is chosen for two properties that have nothing to do with carrying current. It has a large kinetic inductance, so a resonator made from it can be physically small and still resonate low, which is what a kinetic-inductance detector array needs. And its loss at the single-photon powers a qubit readout works at is low enough to compete with the best niobium surfaces. Its transition temperature moves with nitrogen content and strain, which is unusual on this list: the film can be tuned toward the application rather than accepted as it comes.

Where TiN stops

Tunability is also the exposure. A property set by deposition conditions is a property that belongs to one chamber on one day, and TiN is the standing example of a film whose published numbers are hard to reproduce somewhere else. That is a process-window and interface problem rather than a physics one, which is the class that stops programs quietly.

Fields built on TiN

TiN and the other film conductors

Terms used on this page about TiN

SuperMatics is a platform infrastructure company for superconducting devices: software that finds the material and the process, lab work that makes and measures it, and pilot manufacturing with industrial partners.If a conductor on this page stops short of what your device needs, tell us about it.